July 15, 2014
Custom fabricated sapphire wafer carriers for thinning semiconductors that are more durable than quartz and are impervious to polishing abrasives and solvents are available from Meller Optics, Inc. of Providence, Rhode Island.
Meller Sapphire Wafer Carriers feature Moh 9 hardness and superior strength due to off-axis crystal growth; permitting their custom fabrication as thin as 0.018” in 2” to 6” dia. sizes. Ideally suited for the uniform thinning of semi-conductor materials such as GaAs, they can be custom perforated for vacuum hold-down or de-lamination and can withstand repeated use.
Providing part-to-part uniformity with ± 1.2 µm thickness and parallelism
to 10 arc-sec., depending upon size, Meller Sapphire Wafer Carriers are considerably stronger than quartz and other materials. Second only to diamond in terms of hardness, they are chip-, chemical-, and scratch-resistant and can be supplied with reference flats and laser markings.
Meller Sapphire Wafer Carriers are priced according to size, configuration, and quantity; with 4 to 6 weeks typical delivery. Price quotations are available upon request.
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