Quasi-static MEMS Scanner Evaluation Kit.

Evaluation Kit for Quasi-static MEMS Scanners

Quasi-static MEMS Scanner Evaluation Kit.

Quasi-static MEMS Scanner Evaluation Kit. © Photo Fraunhofer IPMS

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26.10.2016

With its »QSDrive Scan Kit«, ResoLin Evaluation Kit, the Fraunhofer Institute of Photonic Microsys-tems (IPMS) in Dresden now offers clients the opportunity for cost-effective and flexible testing of statically-deflectable MEMS-scanning mirrors for applications that so far could not be satisfactorily implemented with commonly used resonant micro-scanners.

A variety of applications used for image capture and projection, spectroscopy and 3D measurement technology invoke the principle of light deflection. Micromechanically-manufactured, one- or two-axis movable scanner mirrors are the preferred technology for applications with high demands of robustness, energy efficiency and overall size. Fraunhofer IPMS ResoLin scanner technology builds upon the manufacturing technology for resonant micro-scanners developed at the institute. The concept is to sustainably tilt the drive combs of the resonant scanners already in place toward each other, thereby allowing a linear drive of the mirror plate in one axis. Furthermore, a resonant drive with a defined frequency in the fast, horizontal axis can be combined with a variable quasi-static deflection on the vertical axis for a projector. Dr. Markus Schwarzenberg, head of the Fraunhofer IPMS research group strongly believes in the potential of the component concept: »Our ResoLin scanner technology provides new possibilities for laser scanning and projection. It can be quickly shifted between targeted positions of the laser beam and it is also possible to dynamically adjust scanning speed. 3D cameras or miniaturized laser projectors so equipped offer higher resolution and make solutions long dreamed of, such as sharp robot eyes or compact hand-held projectors with high image quality, possible.«

Now available, the »QSDrive Scan Kit« evaluation kit particularly appeals to small and mid-sized companies unable to afford in-house development. The kit is comprised of a ResoLin component (a cardanic MEMS scanner with a linear axis and an optional, orthogonally-oriented resonant axis) as well as control electronics to operate components with an optimized trajectory. A scanning head, which due to its special design can be easily integrated into popular optical test setups, is included. Controlled operation as well as the synchronized operation of the resonant axis are possible according to the specific design of the MEMS component. Function control is provided by software over a USB interface.

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