June 2015
Aerotech’s PlanarDLA integrated, open-frame stages have high dynamics and exceptional geometric performance in a low-profile package. These stages are essential for applications ranging from two-sided LED wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high-accuracy and precise geometric performance are necessary.
The PlanarDLA XY design is optimized for applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and noncontact direct-drive linear motors driving through the axes’ center-of-stiffness result in a positioning stage with straightness to ±0.5 µm and flatness to ±1.25 µm.
Structural elements are optimized for high dynamics and high stiffness for the most demanding dynamic applications. The PlanarDLA achieves high servo bandwidths while at the same time maximizing the clear aperture available and keeping the overall height to a minimum. The PlanarDLA enables high-throughput, high-accuracy processing with 2 m/s velocities and 2 g accelerations, resulting in superior process yield and a low total cost of ownership.
At the heart of the PlanarDLA is Aerotech’s proprietary direct-drive technology. This allows for unmatched performance compared to other competitive screw-based and linear motor designs. Only noncontact, direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life.
PlanarDLA stages are available with one or two motors per axis allowing optimization of each axis for the specific application and process. With two motors, the resulting drive force acts through the centers of friction and stiffness for superior geometric performance and accuracy, while one motor per axis is the economical choice if high-throughput and the strictest positioning performance is not required.
The standard cable management system on the PlanarDLA is integrated into the stage and optimized for long life and performance. Several standard options are available for additional servo axes, air/vacuum lines for vacuum chucks, or other process pneumatics.
The PlanarDLA is available in three positioning performance options. High-performance -PLUS and -ULTRA options enable accuracies and straightness values to ±500 nm and orthogonality to 5 µrad.
